Niobium Target
Description
As with good chemical resistance, niobium target has a wide range of applications. Alfa Chemistry produces niobium target by vacuum electron beam melting technology, including square and circular niobium target. We adopt the unique rolling technology to process which is more complex, and the annealing temperature and time of cooperate is more precise to guarantee the high-quality level of the target material.
Alfa Chemistry provides niobium target with uniform, high-density microstructure, and controlled texture, promoting uniform sputtering rates and generally superior sputtering behavior.
General Properties
| Items | Niobium Target |
|---|---|
| Catalog | ACAM-Nb-P006 |
| Material | R04200, R04210 |
| Density | 8.57 g/cm3 |
| Thermal Conductivity | 54 W/m.K |
| Coefficient of Thermal Expansion | 7.3 x 10-6/K |
| Surface roughness | Ra 0.8-1.6 |
| Flatness | 0.1mm or 0.1% |
| Purity | 99.9%, 99.95%, 99.99%, 99.995% |
| Recrystallization | 95% Min |
| Size | Diameter 50～400mm (+/- 0.2mm) / Thickness 3～28mm |
| Form | Round, Square |
| Standard | ASTM B393-05 |
Chemical Component
| Elements | Nb | Fe | Ni | Cr | Cu | Zr | P | Si | Ta | W | Mo |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Content | Remainder | 30 Max | 25 Max | 5 Max | 5 Max | 50 Max | 30 Max | 30 Max | 600 Max | 50 Max | 50 Max |
| Elements | Na | Li | K | U | Th | H | C | O | N | Others | |
| Content | 3 Max | 5 Max | 3 Max | 0.1 Max | 0.1 Max | 15 Max | 40 Max | 130 Max | 20 Max | 10 Max |
* Unit: ppm
Size and Tolerance
We supply round and rectangular plate niobium target. Below are most of the standard sizes for our targets. If you do not see the size that you need, please feel free to contact us.
- Round Target Sizes/Tolerance (mm.max)
| Thickness | Tolerance | Diameter | Tolerance | |
|---|---|---|---|---|
| GradeⅠ | GradeⅠI | |||
| 3-8 | ±0.1 | ±0.2 | 50-450 | ±0.2 |
| 8-14 | ±0.1 | ±0.2 | 50-450 | ±0.2 |
| ≥ 14 | ±0.1 | ±0.2 | 50-400 | ±0.2 |
- Rectangular Target Sizes/Tolerance (mm.max)
| Thickness | Tolerance | Width | Tolerance | Length | Tolerance | |
|---|---|---|---|---|---|---|
| GradeⅠ | GradeⅠI | |||||
| 3-8 | ±0.1 | ±0.2 | 50-400 | ±0.2 | 50-1800 | ±0.2 |
| 8-14 | ±0.1 | ±0.2 | 50-350 | ±0.2 | 50-1500 | ±0.2 |
| ≥ 14 | ±0.1 | ±0.2 | 50-300 | ±0.2 | 50-1200 | ±0.2 |
Applications
Niobium target can find applications in many other areas including:
- Semiconductor
- Optical application
- Chemical vapor deposition
- Physical vapor deposition