Ru Sputtering Targets
Alfa Chemistry provides high-purity ruthenium (Ru) sputtering targets in different specifications. Ru sputtering targets have good heat resistance, corrosion resistance and mechanical strength, and are suitable for use in high temperature, high pressure and corrosive environments. They are widely used in the preparation of high-tech products such as semiconductors, photovoltaic cells, and liquid crystal displays. You can view detailed information about Ru sputtering targets below.
Basic Information
| Items | Ru Sputtering Targets |
|---|---|
| Catalog | ACAM-ST-PM007 |
| Material | Ruthenium |
| Symbol | Ru |
| Color | Silvery White |
| Thermal Conductivity (W/m·K) | 120 |
| Melting Point (°C) | 2310 |
| Theoretical Density (g/cc) | 12.3 |
| Coefficient Of Thermal Expansion | 6.4 x 10-6/K |
Regular Size And Purity
| Size | Purity |
|---|---|
| 1.00" Diameter × 0.125" Thick | 99.95% |
| 1.00" Diameter × 0.250" Thick | 99.95% |
| 2.00" Diameter × 0.125" Thick | 99.95% |
| 2.00" Diameter × 0.250" Thick | 99.95% |
| 3.00" Diameter × 0.125" Thick | 99.95% |
| 3.00" Diameter × 0.250" Thick | 99.95% |
| 4.00" Diameter × 0.125" Thick | 99.95% |
| 4.00" Diameter × 0.250" Thick | 99.95% |
* Some of the Ru sputtering targets of the above sizes and purities are in stock, and other sizes and purities can be customized. Please send us an inquiry for more information.
Bonded Assemblies Specifications
| Material | Target Size | Purity | Bonding Type | Backing Plate Size |
|---|---|---|---|---|
| Ruthenium | 2.00" Diameter × 0.125" Thick | 99.95% | Indium | 2.00" Diameter × 0.125" Thick |
| Ruthenium | 2.00" Diameter × 0.125" Thick | 99.95% | Elastomer | 2.00" Diameter × 0.125" Thick |
| Ruthenium | 3.00" Diameter × 0.125" Thick | 99.95% | Elastomer | 3.00" Diameter × 0.125" Thick |
| Ruthenium | 4.00" Diameter × 0.125" Thick | 99.95% | Elastomer | 4.00" Diameter × 0.125" Thick |
Material Forms
In addition to round Ru sputtering targets, we also provide Ru sputtering targets in other forms, such as square targets, tube targets, arc targets and special-shaped targets.
Recycle
We provide recycling services for Ru sputtering targets and other precious metal targets, aiming to reduce your material costs by recycling precious metals, spent targets, etc.
