Inquiry

AlN Sputtering Targets

AlN Sputtering Targets

Alfa Chemistry provides aluminum nitride (AlN) sputtering targets in different specifications. AlN sputtering targets have the characteristics of high hardness, high melting point, stable chemical properties, good electrical conductivity and excellent thermal conductivity, and are widely used in optoelectronic engineering. You can view detailed information about AlN sputtering targets below.

Basic Information

ItemsAlN Sputtering Targets
CatalogACAM-ST-C006
MaterialAluminum Nitride
SymbolAlN
ColorBluish White
AppearanceCrystalline Solid
Melting Point (°C)>2200
Theoretical Density (g/cc)3.26
Purity99.8%

* If you need AlN sputtering targets of other purities, please contact us for customization.

Regular Size

Diameter (inch)Thick (inch)
1.000.125
1.000.250
2.000.125
2.000.250
3.000.125
3.000.250
4.000.125
4.000.250
6.000.250

* Some of the AlN sputtering targets of the above sizes are in stock, and other sizes can be customized. Please send us an inquiry for more information.

Bonded Assemblies Specifications

MaterialTarget SizePurityBonding TypeBacking Plate Size
Aluminum Nitride1.00" Diameter × 0.125" Thick99.8%Elastomer1.00" Diameter × 0.125" Thick
Aluminum Nitride2.00" Diameter × 0.125" Thick99.8%Elastomer2.00" Diameter × 0.125" Thick
Aluminum Nitride2.00" Diameter × 0.125" Thick99.8%Elastomer2.00" Diameter × 0.092" Thick
Aluminum Nitride3.00" Diameter × 0.125" Thick99.8%Elastomer3.00" Diameter × 0.125" Thick
Aluminum Nitride4.00" Diameter × 0.125" Thick99.8%Elastomer4.00" Diameter × 0.092" Thick

Material Forms

In addition to round AlN sputtering targets, we also provide AlN sputtering targets in other forms, such as square targets, tube targets, arc targets and special-shaped targets.

Applications

As high-performance ceramic targets, AlN sputtering targets can be used in the manufacture of the following devices and materials.

  • Electronic devices such as LED devices
  • Solar cells
  • Optical devices
  • Display devices
  • Biological sensors
  • Surface acoustic wave devices
  • Heat-emitting devices
  • High-temperature crucibles
  • Metal matrix and polymer matrix composite materials
  • High-temperature sealing adhesives
  • Electronic packaging materials
  • ...

Alfa Chemistry focuses on the R&D and production of sputtering targets. We provide AlN sputtering targets of various specifications, and we also support target customization. If you have any questions or needs, please do not hesitate to contact us.

Contact Us