Zr Sputtering Targets

Alfa Chemistry provides zirconium (Zr) sputtering targets in different specifications. Zr sputtering targets have the characteristics of high purity, high density, high temperature resistance and corrosion resistance. High-purity can avoid the impact of impurities on film properties. High-density can improve the adhesion and density of the film. High temperature resistance and corrosion resistance can ensure the stability and life of Zr sputtering targets during the preparation process. These properties make them key materials in many fields. Zr sputtering targets are commonly used in the manufacture of integrated circuits and semiconductor devices. In addition, they are also used in the production of various optical films, such as anti-reflective films and filter films. You can view detailed information about Zr sputtering targets below.
Basic Information
Items | Zr Sputtering Targets |
---|---|
Catalog | ACAM-ST-CM027 |
Material | Zirconium |
Symbol | Zr |
Color | Silvery White |
Thermal Conductivity (W/m·K) | 22.7 |
Melting Point (°C) | 1852 |
Theoretical Density (g/cc) | 6.49 |
Coefficient Of Thermal Expansion | 5.7 x 10-6/K |
Regular Size And Purity
Size | Purity |
---|---|
1.00" Diameter × 0.125" Thick | 99.9%, 99.99% |
1.00" Diameter × 0.250" Thick | 99.9%, 99.99% |
2.00" Diameter × 0.125" Thick | 99.9%, 99.99% |
2.00" Diameter × 0.250" Thick | 99.9%, 99.99% |
3.00" Diameter × 0.125" Thick | 99.9%, 99.99% |
3.00" Diameter × 0.250" Thick | 99.9%, 99.99% |
4.00" Diameter × 0.125" Thick | 99.9%, 99.99% |
4.00" Diameter × 0.250" Thick | 99.9%, 99.99% |
6.00" Diameter × 0.125" Thick | 99.9%, 99.99% |
6.00" Diameter × 0.250" Thick | 99.9%, 99.99% |
8.00" Diameter × 0.125" Thick | 99.9%, 99.99% |
8.00" Diameter × 0.250" Thick | 99.9%, 99.99% |
* Some of the Zr sputtering targets of the above sizes and purities are in stock, and other sizes and purities can be customized. Please send us an inquiry for more information.
Material Forms
In addition to round Zr sputtering targets, we also provide Zr sputtering targets in other forms, such as square targets, tube targets, arc targets and special-shaped targets.


Alfa Chemistry specializes in the production of Zr sputtering targets with the highest possible density and highest possible purity. We'll help you choose the right target materials, manufacturing processes, bonded assemblies and backing plates. If you have any questions or needs, please do not hesitate to contact us.
Interested in our products?
Contact Us