Al2O3 Sputtering Targets
Alfa Chemistry provides aluminum oxide (Al2O3) sputtering targets in different specifications. Al2O3 sputtering targets are high-purity, high-density ceramic materials that not only have excellent stability, but can also withstand extreme thermal environments. They play a key role in fields such as the microelectronics industry, precision optics and surface engineering. You can view detailed information about Al2O3 sputtering targets below.
Basic Information
| Items | Al2O3 Sputtering Targets |
|---|---|
| Catalog | ACAM-ST-C001 |
| Material | Aluminum Oxide |
| Symbol | Al2O3 |
| Color | White |
| Appearance | Crystalline Solid |
| Melting Point (°C) | 2072 |
| Theoretical Density (g/cc) | 3.97 |
| Purity | 99.99% |
* If you need Al2O3 sputtering targets of other purities, please contact us for customization.
Regular Size
| Diameter (inch) | Thick (inch) |
|---|---|
| 1.00 | 0.125 |
| 1.00 | 0.250 |
| 2.00 | 0.125 |
| 2.00 | 0.250 |
| 3.00 | 0.125 |
| 3.00 | 0.250 |
| 4.00 | 0.125 |
| 4.00 | 0.250 |
| 6.00 | 0.125 |
| 6.00 | 0.250 |
| 8.00 | 0.125 |
| 8.00 | 0.250 |
* Some of the Al2O3 sputtering targets of the above sizes are in stock, and other sizes can be customized. Please send us an inquiry for more information.
Bonded Assemblies Specifications
| Material | Target Size | Purity | Bonding Type | Backing Plate Size |
|---|---|---|---|---|
| Aluminum Oxide | 2.00" Diameter × 0.125" Thick | 99.99% | Indium | 2.00" Diameter × 0.125" Thick |
| Aluminum Oxide | 2.00" Diameter × 0.125" Thick | 99.99% | Indium | 2.00" Diameter × 0.092" Thick |
| Aluminum Oxide | 2.00" Diameter × 0.125" Thick | 99.99% | Elastomer | 2.00" Diameter × 0.125" Thick |
| Aluminum Oxide | 2.00" Diameter × 0.125" Thick | 99.999% | Indium | 2.00" Diameter × 0.125" Thick |
| Aluminum Oxide | 2.00" Diameter × 0.125" Thick | 99.999% | Indium | 2.00" Diameter × 0.092" Thick |
| Aluminum Oxide | 2.00" Diameter × 0.125" Thick | 99.999% | Elastomer | 2.00" Diameter × 0.125" Thick |
| Aluminum Oxide | 3.00" Diameter × 0.125" Thick | 99.99% | Indium | 3.00" Diameter × 0.125" Thick |
| Aluminum Oxide | 3.00" Diameter × 0.125" Thick | 99.99% | Indium | 3.00" Diameter × 0.092" Thick |
| Aluminum Oxide | 3.00" Diameter × 0.125" Thick | 99.99% | Elastomer | 3.00" Diameter × 0.125" Thick |
| Aluminum Oxide | 3.00" Diameter × 0.125" Thick | 99.999% | Indium | 3.00" Diameter × 0.125" Thick |
| Aluminum Oxide | 3.00" Diameter × 0.125" Thick | 99.999% | Elastomer | 3.00" Diameter × 0.125" Thick |
| Aluminum Oxide | 4.00" Diameter × 0.125" Thick | 99.99% | Indium | 4.00" Diameter × 0.125" Thick |
| Aluminum Oxide | 4.00" Diameter × 0.125" Thick | 99.999% | Elastomer | 4.00" Diameter × 0.100" Thick |
Material Forms
In addition to round Al2O3 sputtering targets, we also provide Al2O3 sputtering targets in other forms, such as square targets, tube targets, arc targets and special-shaped targets.
Alfa Chemistry focuses on the R&D and production of sputtering targets. We provide Al2O3 sputtering targets of various specifications, and we also support target customization. If you have any questions or needs, please do not hesitate to contact us.
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